Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Auteur: Madou, Marc J. (University of California, Irvine, USA)
Editeur: Taylor & Francis Inc
Offers a complete MEMS and NEMS reference. Discussing a variety of approaches, this title includes developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. It also provides both classroom and self-learners with worked-out example problems.

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Offers a complete MEMS and NEMS reference. Discussing a variety of approaches, this title includes developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. It also provides both classroom and self-learners with worked-out example problems.
ISBN / EAN 9780849331800
Auteur Madou, Marc J. (University of California, Irvine, USA)
Editeur Taylor & Francis Inc